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Chemical Vapor Deposition of TiO2, ZrO2, and Pb(Zr,Ti)O3 films with Pb(tmhd)2-PMDT, Ti(dmae)4, and Zr(dmae)4 as metalorganic precursors

Title
Chemical Vapor Deposition of TiO2, ZrO2, and Pb(Zr,Ti)O3 films with Pb(tmhd)2-PMDT, Ti(dmae)4, and Zr(dmae)4 as metalorganic precursors
Authors
이시우
Date Issued
2000-08-04
Publisher
한국화학공학회 재료부문위원회
URI
https://oasis.postech.ac.kr/handle/2014.oak/76285
Article Type
Conference
Citation
제3회 CVD 심포지움, page. 15, 2000-08-04
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