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Composition and thikcness uniformity of chemically vapor deposited barium strontium titanate films on a patterned structure
- Title
- Composition and thikcness uniformity of chemically vapor deposited barium strontium titanate films on a patterned structure
- Authors
- 이시우
- Date Issued
- 2000-08-04
- Publisher
- 한국화학공학회 재료부문위원회
- Article Type
- Conference
- Citation
- 제 3회 CVD 심포지엄, page. 58, 2000-08-04
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