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DLI-MOCVD 공정을 이용한 Hf aluminate 증착
- Title
- DLI-MOCVD 공정을 이용한 Hf aluminate 증착
- Authors
- 이시우
- Date Issued
- 2002-11-01
- Publisher
- 한국재료학회
- Article Type
- Conference
- Citation
- 2002년도 한국재료학회, page. 83, 2002-11-01
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