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2D Fluid Simulation of VHF_ICP Source with Parallel Resonance Antenna for Next Generation Etch Processing
- Title
- 2D Fluid Simulation of VHF_ICP Source with Parallel Resonance Antenna for Next Generation Etch Processing
- Authors
- 이재구
- Date Issued
- 2005-10-01
- Article Type
- Conference
- Citation
- 58th The Gaseous Electronic Conference, The American Physical Society, 2005-10-01
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