Ru ALD:comparative studies between RuCp2 and Ru(EtCp)2
- Title
- Ru ALD:comparative studies between RuCp2 and Ru(EtCp)2
- Authors
- 김형준
- Date Issued
- 2006-07-01
- Publisher
- AVS
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/72809
- Article Type
- Conference
- Citation
- ALD 2006, 2006-07-01
- Files in This Item:
- There are no files associated with this item.
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