Study on Nucleation Behavior of ALD Ru Thin Films on Various Substrates
- Title
- Study on Nucleation Behavior of ALD Ru Thin Films on Various Substrates
- Authors
- 김형준
- Date Issued
- 2006-10-01
- Publisher
- 대한금속 재료학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/72685
- Article Type
- Conference
- Citation
- 2006 Fall Conference of the Korean Institute of Metals and Materials, 2006-10-01
- Files in This Item:
- There are no files associated with this item.
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