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Maximizing the opportunities of atomic layer deposition : Metallic nanostructure fabrication and in situ nitrogen depth profiling for high k
- Title
- Maximizing the opportunities of atomic layer deposition : Metallic nanostructure fabrication and in situ nitrogen depth profiling for high k
- Authors
- 김형준
- Date Issued
- 2007-06-01
- Publisher
- AVS
- Article Type
- Conference
- Citation
- ALD 2007, 2007-06-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg