The Improvements in the Reliability of High k Dielectrics by Atomic Scale Nitrogen Depth Profile Control during Atomic Layer Deposition
- Title
- The Improvements in the Reliability of High k Dielectrics by Atomic Scale Nitrogen Depth Profile Control during Atomic Layer Deposition
- Authors
- 김형준
- Date Issued
- 2007-11-01
- Publisher
- Korean Ceramic Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/72502
- Article Type
- Conference
- Citation
- The International Conference of Korean Ceramic Society for 50th Anniversary, 2007-11-01
- Files in This Item:
- There are no files associated with this item.
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