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A micro-machined hydrophone using piezoelectricity on gate of a field-effect transistor

Title
A micro-machined hydrophone using piezoelectricity on gate of a field-effect transistor
Authors
문원규성민신금재
POSTECH Authors
문원규
Date Issued
23-Jun-2015
Publisher
IEEE, Transducer Research Foundation, Electron Devices Society
URI
http://oasis.postech.ac.kr/handle/2014.oak/69784
Article Type
Conference
Citation
18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), 2015-06-23
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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