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Quantitative Analysis on the Dopant(As) Distribution in Real 3D FinFET Devices
- Title
- Quantitative Analysis on the Dopant(As) Distribution in Real 3D FinFET Devices
- Date Issued
- 2014-08-31
- Publisher
- IFES
- Article Type
- Conference
- Citation
- APT&M, 2014-08-31
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg