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Ion energy distribution in Ballistic-mode plasma immersion ion implantation for surface modification of insulating material
- Title
- Ion energy distribution in Ballistic-mode plasma immersion ion implantation for surface modification of insulating material
- Authors
- 조무현
- Date Issued
- 2014-10-24
- Publisher
- 한국물리학회
- Article Type
- Conference
- Citation
- 한국물리학회 2014년 가을 학술논문발표회, 2014-10-24
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Related Researcher
- 조무현CHO, MOO HYUN
- Div. of Advanced Nuclear Enginrg