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Characterization of Plasema-doped Si Fin Structure by Atom Probe Tomography
- Title
- Characterization of Plasema-doped Si Fin Structure by Atom Probe Tomography
- Date Issued
- 2013-04-25
- Publisher
- 대한금속재료학회
- Article Type
- Conference
- Citation
- 춘계 금속재료학회, 2013-04-25
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg