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3D Evaluation of the diffusion barrier properties in Nand-flash gate
- Title
- 3D Evaluation of the diffusion barrier properties in Nand-flash gate
- Date Issued
- 2013-05-27
- Publisher
- EMRS
- Article Type
- Conference
- Citation
- E-MRS spring, 2013-05-27
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg