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3D Evaluation of the diffusion barrier properties in Nand-flash gate

Title
3D Evaluation of the diffusion barrier properties in Nand-flash gate
Authors
박찬경이지현장동현
POSTECH Authors
박찬경
Date Issued
27-May-2013
Publisher
EMRS
URI
http://oasis.postech.ac.kr/handle/2014.oak/67031
Article Type
Conference
Citation
E-MRS spring, 2013-05-27
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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