3D Evaluation of the diffusion barrier properties in Nand-flash gate
- Title
- 3D Evaluation of the diffusion barrier properties in Nand-flash gate
- Authors
- 박찬경; 이지현; 장동현
- Date Issued
- 2013-05-27
- Publisher
- EMRS
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/67031
- Article Type
- Conference
- Citation
- E-MRS spring, 2013-05-27
- Files in This Item:
- There are no files associated with this item.
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