Atom probe study on the adhesion property and compositional variation in W/poly–Si NAND gate structure with inter-control layer
- Title
- Atom probe study on the adhesion property and compositional variation in W/poly–Si NAND gate structure with inter-control layer
- Authors
- 박찬경; 장동현; 이지현
- Date Issued
- 2013-08-04
- Publisher
- TMS
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/67029
- Article Type
- Conference
- Citation
- PRICM 8, 2013-08-04
- Files in This Item:
- There are no files associated with this item.
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