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3D Evaluation of the Dopant Distribution in NVM Structures using Atom Probe Tomography
- Title
- 3D Evaluation of the Dopant Distribution in NVM Structures using Atom Probe Tomography
- Date Issued
- 2013-10-29
- Publisher
- KVS
- Article Type
- Conference
- Citation
- SIMS-19, 2013-10-29
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg