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Atom Probe Tomography Analysis of Thin Si/SiO2 Multi-layer Film and
- Title
- Atom Probe Tomography Analysis of Thin Si/SiO2 Multi-layer Film and
- Date Issued
- 2013-12-01
- Publisher
- MRS
- Article Type
- Conference
- Citation
- MRS fall 2013, 2013-12-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg