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1축 진동형 MEMS 자이로의 구동회로 제작
- Title
- 1축 진동형 MEMS 자이로의 구동회로 제작
- Date Issued
- 2014-02-24
- Publisher
- 한양대학교BK21플러스사업단,한국반도체산업협회,한국반도체연구조합
- Article Type
- Conference
- Citation
- 제21회 한국반도체학술대회, 2014-02-24
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg