Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
UHV-CVD를 이용한 SiGe 에피 성장 및 Multi-Stacked 구조의 Suspended 나노선 응용
- Title
- UHV-CVD를 이용한 SiGe 에피 성장 및 Multi-Stacked 구조의 Suspended 나노선 응용
- Authors
- 이정수
- Date Issued
- 2013-02-04
- Publisher
- 한국반도체학술대회
- Article Type
- Conference
- Citation
- 제20회 한국반도체학술대회 (KCS 2013), 2013-02-04
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg