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Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique

Title
Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique
Authors
임근배M. NishizawaH. NiitsumaM. Esashi
POSTECH Authors
임근배
Date Issued
15-Jun-1998
Publisher
Society of Exploration Geophysicists of Japan
URI
http://oasis.postech.ac.kr/handle/2014.oak/63690
Article Type
Conference
Citation
Proceeding of the 98th SEGJ (Society of Exploration Geophysicists of Japan) Conference, 1998-06-15
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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