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Fabrication and characterization of MOS transistor tip integrated micro cantilever

Title
Fabrication and characterization of MOS transistor tip integrated micro cantilever
Authors
임근배Sanghoon LeeGeunbae LimWonkyu Moon
POSTECH Authors
임근배
Date Issued
8-May-2005
Publisher
Nanotech
URI
http://oasis.postech.ac.kr/handle/2014.oak/63677
Article Type
Conference
Citation
Nanotech 2005, 2005-05-08
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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