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Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever

Title
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
Authors
임근배Sanghoon LeeWonkyu Moon
POSTECH Authors
임근배
Date Issued
10-Jun-2005
Publisher
HARMST
URI
http://oasis.postech.ac.kr/handle/2014.oak/63674
Article Type
Conference
Citation
HARMST, 2005, 2005-06-10
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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