Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography
- Title
- Dimensional Analyses of Dopants in Fin Structure By using Atom Probe Tomography
- Authors
- 박찬경; 김보화; 구길호
- Date Issued
- 2012-02-05
- Publisher
- APMC
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/63445
- Article Type
- Conference
- Citation
- APMC 2012, 2012-02-05
- Files in This Item:
- There are no files associated with this item.
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