Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

3차원 원자탐침 전자현미경을 이용한 Si 기판에 패터닝 된 Fin 구조 내 도핑 원소분석

Title
3차원 원자탐침 전자현미경을 이용한 Si 기판에 패터닝 된 Fin 구조 내 도핑 원소분석
Authors
박찬경김보화박성민구길호
POSTECH Authors
박찬경
Date Issued
15-Feb-2012
Publisher
고려대학교
URI
http://oasis.postech.ac.kr/handle/2014.oak/63444
Article Type
Conference
Citation
제19회 한국반도체학술대회, 2012-02-15
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
Read more

Views & Downloads

Browse