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Fabrication of PDMS Nano Stamp by Replicating Si Nano Mold Fabricated by Interference Lithography
- Title
- Fabrication of PDMS Nano Stamp by Replicating Si Nano Mold Fabricated by Interference Lithography
- Date Issued
- 2011-11-17
- Publisher
- ASPEN
- Article Type
- Conference
- Citation
- The 4th International Conference of Asian Society for Precision Engineering and Nanotechnology, 2011-11-17
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