Fabrication of PDMS Nano Stamp by Replicating Si Nano Mold Fabricated by Interference Lithography
- Fabrication of PDMS Nano Stamp by Replicating Si Nano Mold Fabricated by Interference Lithography
- 김준원; 변익주; 박종호; 김범준
- POSTECH Authors
- Date Issued
- Article Type
- The 4th International Conference of Asian Society for Precision Engineering and Nanotechnology, 2011-11-17
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