In-situ synchrotron X-ray scattering study on the initial structure of Ru-metal Atomic Layer Deposition films for the electronic devices.
- Title
- In-situ synchrotron X-ray scattering study on the initial structure of Ru-metal Atomic Layer Deposition films for the electronic devices.
- Authors
- 백성기; 박용준; 이한보람; 김우희; 이동열; 김형준; 이시우
- Date Issued
- 2009-04-13
- Publisher
- Material Research Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/58541
- Article Type
- Conference
- Citation
- 2009MRS Spring Meeting, 2009-04-13
- Files in This Item:
- There are no files associated with this item.
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