In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.
- Title
- In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.
- Authors
- 백성기; 박용준; 김형준; 이시우
- Date Issued
- 2010-06-20
- Publisher
- American Vacuum Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/58529
- Article Type
- Conference
- Citation
- ALD2010, 2010-06-20
- Files in This Item:
- There are no files associated with this item.
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