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In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.
- Title
- In-situ Synchrotron X-ray Scattering Study of Thin Film Growth by Atomic Layer Deposition.
- Date Issued
- 2010-06-20
- Publisher
- American Vacuum Society
- Article Type
- Conference
- Citation
- ALD2010, 2010-06-20
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