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Quantitative Atomic-Scale Analysis of Interface Structure of CoSi2 on polycrystalline and single crystalline silicon using by STEM-HAADF and 3D-AP

Title
Quantitative Atomic-Scale Analysis of Interface Structure of CoSi2 on polycrystalline and single crystalline silicon using by STEM-HAADF and 3D-AP
Authors
박찬경구길호이한보람김형준
Date Issued
2008-09-02
Publisher
IUCr
URI
https://oasis.postech.ac.kr/handle/2014.oak/52199
Article Type
Conference
Citation
International Union of Crystallography, 2008-09-02
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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