Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
High Quality Nickel Atomic Layer Deposition for Nanoscale Contact Applications
- Title
- High Quality Nickel Atomic Layer Deposition for Nanoscale Contact Applications
- Authors
- 김우희; 이한보람; Kwang Heo; Seunghun Hong; 김형준
- Publisher
- 재료학회
- Article Type
- Conference
- Citation
- 2009년도 재료학회 춘계학술 대회 및 제 16회 신소재 심포지엄
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg