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무전해 식각법을 이용한 실리콘 나노와이어 FET 소자

Title
무전해 식각법을 이용한 실리콘 나노와이어 FET 소자
Authors
김형준문경주최지혁이태일맹완주명재민
Date Issued
2009-05-21
Publisher
재료학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/51647
Article Type
Conference
Citation
2009년도 재료학회 춘계학술 대회 및 제 16회 신소재 심포지엄, 2009-05-21
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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