Atomic layer chemical vapor deposition for silicon nano devices
- Title
- Atomic layer chemical vapor deposition for silicon nano devices
- Authors
- 이시우
- Date Issued
- 2009-04-24
- Publisher
- 한국화학공학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/51545
- Article Type
- Conference
- Citation
- 한국화학공학회, 2009-04-24
- Files in This Item:
- There are no files associated with this item.
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