Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
ALD of TaCxNy for gate metal applications.
- Title
- ALD of TaCxNy for gate metal applications.
- Authors
- 이시우
- Date Issued
- 2009-04-17
- Publisher
- 한국 ALD 연구회
- Article Type
- Conference
- Citation
- The 5th 2009 KOREAN ALD WORKSHOP, 2009-04-17
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.