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Conformal, low-damage shallow junction technology (Xj~5nm) with optimized contacts for FinFETs as a Solution Beyond 14nm Node
- Title
- Conformal, low-damage shallow junction technology (Xj~5nm) with optimized contacts for FinFETs as a Solution Beyond 14nm Node
- Date Issued
- 2012-05-14
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- IEEE IWJT (2012), 2012-05-14
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg