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Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Shaped Epitaxy
- Title
- Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Shaped Epitaxy
- Date Issued
- 2012-09-05
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- IEEE SISPAD 2012, 2012-09-05
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg