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Carbon nanotube-induced chemical etching of SiO2 layer for sub-10 nm lithography and its mechanism study
- Title
- Carbon nanotube-induced chemical etching of SiO2 layer for sub-10 nm lithography and its mechanism study
- Date Issued
- 2007-11-27
- Publisher
- Material research societ
- Article Type
- Conference
- Citation
- 2007 MRS Fall Meeting, 2007-11-27
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Related Researcher
- 최희철CHOI, HEE CHEUL
- Dept of Chemistry