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New surface chemistry of carbon nanotubes enabling sub-10 nm lithography

Title
New surface chemistry of carbon nanotubes enabling sub-10 nm lithography
Authors
최희철
Date Issued
2009-03-17
Publisher
Semicon
URI
https://oasis.postech.ac.kr/handle/2014.oak/47018
Article Type
Conference
Citation
ISTC/SCTIC 2009 Conference, 2009-03-17
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