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The mechanism of Ti/Al/Ni/Au ohmic contact on AlGaN/GaN heterostructure field effect transistor

Title
The mechanism of Ti/Al/Ni/Au ohmic contact on AlGaN/GaN heterostructure field effect transistor
Authors
김종규K. H. KimC. M. JeonH. W. JangJ. H. LeeJ. –H. LeeG. –H. KimK. –S. LeeB. LeeJong-Lam Lee
Date Issued
2001-11-26
Publisher
2001 Materials Research Society (MRS) Fall meeting
URI
https://oasis.postech.ac.kr/handle/2014.oak/46799
Article Type
Conference
Citation
2001 Materials Research Society (MRS) Fall meeting, page. 205, 2001-11-26
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김종규KIM, JONG KYU
Dept of Materials Science & Enginrg
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