Nanopore Imprinting in Spin-On Dielectric Polymers with Star-Shape Six-Armed Porogens
- Title
- Nanopore Imprinting in Spin-On Dielectric Polymers with Star-Shape Six-Armed Porogens
- Authors
- 한송이; 김경태; 함석규; 이택준; 진상우; 김동민; 노예철; 안병철; 박삼대; 김진철; 권원상; 김가희; 정정운
- Date Issued
- 2009-02-16
- Publisher
- RIKEN and Spring-8
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/46455
- Article Type
- Conference
- Citation
- 1st Workshop on FEL Science: Coherent Intense X-rays in Physics and Biology, 2009-02-16
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- There are no files associated with this item.
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