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초소수성 실리콘 나노그래스 표면 단 공정 제작

Title
초소수성 실리콘 나노그래스 표면 단 공정 제작
Authors
임근배조성진안태창김진영
Date Issued
2010-04-01
Publisher
KMEMS
URI
https://oasis.postech.ac.kr/handle/2014.oak/44577
Article Type
Conference
Citation
제 12회 한국 MEMS 학술대회, 2010-04-01
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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