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대변위 고민감도를 위한 정전용량형 센서의 설계조건

Title
대변위 고민감도를 위한 정전용량형 센서의 설계조건
Authors
문원규강대실김무진
Date Issued
2009-11-11
Publisher
한국센서학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/43639
Article Type
Conference
Citation
2009년 한국센서학회 종합학술대회, 2009-11-11
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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