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Department of Chemical Engineering (화학공학과)
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Article
Synthesis and properties of UV curable polyvinylsilazane as a precursor for microstructuring
SCIE
SCOPUS
POLYMERS FOR ADVANCED TECHNOLOGIES, vol. 26, no. 3, page. 245 - 249, 2015-03
Li, YH
;
Ahn, KD
;
Kim, DP
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CERAMIC MICROSTRUCTURES
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FUTURE
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INORGANIC POLYMER
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MEMS
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microstructure
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photoresist
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