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Browsing "Department of Chemical Engineering (화학공학과)" by  SubjectHAFNIUM

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하
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Showing results 7 to 8 of 8
Article
Photoelectron spectroscopic analysis of Hf-silicate/SiO2/Si stacks deposited by atomic layer chemical vapor depositionSCIESCOPUS

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 24, no. 3, page. 1147 - 1150, 2006-05

Article
Physical and electrical characterizations of ultrathin Si-rich Hf-silicate film and Hf-silicate/SiO2 bilayer deposited by atomic layer chemical vapor depositionSCIESCOPUS

JOURNAL OF APPLIED PHYSICS, vol. 100, no. 4, page. 44106-1 - 44106-5, 2006-08-15

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