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JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 42, no. 6B, page. 4089 - 4092, 2003-06
SENSORS AND ACTUATORS A-PHYSICAL, vol. 90, no. 3, page. 232 - 239, 2001-05-20
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 12, no. 6, page. 813 - 823, 2002-11
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 41, no. 6B, page. 4362 - 4365, 2002-06
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