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Browsing "Department of Materials Science & Engineering (신소재공학과)" by  SubjectTANTALUM OXIDE

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하
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Article
Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactantsSCIESCOPUS

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 24, no. 5, page. 2276 - 2281, 2006-09

Article
Thermal and plasma-enhanced ALD of Ta and Ti oxide thin films from alkylamide precursorsSCIESCOPUS

ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 9, no. 6, page. G191 - G194, 2006-01

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