Design parameter analysis for a planar type reactive ion etcher
- Title
- Design parameter analysis for a planar type reactive ion etcher
- Authors
- 강봉구; 박성호; 전영진
- Date Issued
- 1989-01
- Publisher
- J. of KITE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/40164
- Article Type
- Article
- Citation
- J. of KITE, vol. 26, page. 1658 - 1666, 1989-01
- Files in This Item:
- There are no files associated with this item.
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