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2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발 KCI
- Title
- 2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발
- Date Issued
- 2015-08
- Publisher
- 한국센서학회
- ISSN
- 1225-5475
- Article Type
- Article
- Citation
- 센서학회지, vol. 24, no. 4, page. 274 - 279, 2015-08
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