TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON RADIATION FOR TRACE IMPURITY ANALYSIS OF SILICON WAFER SURFACES
- Title
- TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON RADIATION FOR TRACE IMPURITY ANALYSIS OF SILICON WAFER SURFACES
- Authors
- C. H. Chang; Y. M. Koo; H. Padmore
- POSTECH Authors
- Y. M. Koo
- Date Issued
- 1996-01
- Publisher
- 대한금속재료학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/38508
- Article Type
- Article
- Citation
- METALS AND MATERIALS INTERNATIONAL, vol. 2, no. 1, page. 23 - 29, 1996-01
- Files in This Item:
- There are no files associated with this item.
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