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원거리 플라즈마 화학증착을 이용한 저온 규소 박막의 결정성

Title
원거리 플라즈마 화학증착을 이용한 저온 규소 박막의 결정성
Authors
김동환
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898500
https://oasis.postech.ac.kr/handle/2014.oak/3729
Article Type
Thesis
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