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Study on the method for the reliability test of focused ion beam SCIE SCOPUS
- Title
- Study on the method for the reliability test of focused ion beam
- Date Issued
- 2007-03
- Publisher
- SPRINGER
- Keywords
- SILICON
- ISSN
- 0946-7076
- Article Type
- Article
- Citation
- MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, vol. 13, no. 5-6, page. 569 - 577, 2007-03
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Related Researcher
- 조동우CHO, DONG WOO
- Dept of Mechanical Enginrg