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직접 광영기 PHOTO-CVD에 의한 이산화실리콘 박막의 증착특성
- Title
- 직접 광영기 PHOTO-CVD에 의한 이산화실리콘 박막의 증착특성
- POSTECH Authors
- 강봉구
- Date Issued
- 1989-01
- Publisher
- 대한전자공학회
- ISSN
- 1016-135X
- Article Type
- Article
- Citation
- 전자공학회논문지, vol. 26, no. 7, page. 1025 - 1034, 1989-01
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg