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평판형 반응성 이온 식각기의 설계변수 분석

Title
평판형 반응성 이온 식각기의 설계변수 분석
Authors
강봉구박성호전영진
POSTECH Authors
강봉구
Date Issued
1989-01
Publisher
대한전자공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/33324
ISSN
1016-135X
Article Type
Article
Citation
전자공학회논문지, vol. 26, no. 11, page. 1658 - 1665, 1989-01
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강봉구KANG, BONG KOO
Dept of Electrical Enginrg
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